SharePoint
Aide
IRSN, Institut de radioprotection et de sûreté nucléaire

Search our site :

ok

Contact us :

ok
En Fr

Enhancing Nuclear Safety


Research

Publications

Qualification of particle surface probe : requirements and development of a test bench


Congress title :11th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal 
Congress location :Orono
Congress date :16/07/2008

Document type > *Congrès/colloque

Keywords > cleanliness, laser mega joule, particle, surface

Research Unit > IRSN/DSU/SERAC/LPMA

Authors > BASSO Guillaume, GENSDARMES François, TOVENA-PECAULT Isabelle

Publication Date > 16/07/2008

Summary

  For high-tech industries, such as semiconductor or optical ones, controls must be done not only on airborne particle contaminants in cleanrooms but also on surface particle contamination. Nowadays, an international standard is on progress: ISO 14644-9. This standard "Cleanrooms and associated controlled environments Part 9: Classification of surface particle cleanliness" describes the classification of the particle contamination levels on solid surfaces in cleanrooms. Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes. This standard applies to all solid surfaces such as walls, ceilings, floors, working environment, tools, equipment and devices. The surface particle cleanliness classification is limited to particles between 0.05 µm and 500 µm.
In order to classify the particle contamination on metallic or plastic or glass surfaces, surfacic commercial probes exist but none of them are correctly calibrated. In this paper, a qualification bench developed in collaboration between CEA and IRSN is described and the results obtained for a surfacic probe based on airflow particle resuspension and optical particle counter measurement are presented. The effects of particle-surface natures and particle diameter are discussed on the bases of resuspension efficiency and transmission-detection efficiency for particles between 30 µm and 80 µm.
Send Print

More about

Contact


Close

Send to a friend

The information you provide in this page are single use only and will not be saved.
* Required fields

Recipient's email:*  

Sign with your name:* 

Type your email address:*   

Add a message :

Do you want to receive a copy of this email?

Send

Cancel

Close

WP_IMPRIMER_TITLE

WP_IMPRIMER_MESSAGE

Back

Ok